Plasma assited MO-CVD of perooskite dalectric films

ABSTRACT

Disclosed is a method of forming a Perovskite-type dielectric film on a substrate under low temperature by decomposing and reacting vapor of organometallic compound containing metal for the dielectric, vapor of organometallic compound containing titanium, and oxygen in a reduced-pressure and plasma.

BACKGROUND OF THE INVENTION

1. Field of the Invention

The present invention relates to a method of manufacturing Perovskite dielectric film which has outstanding dielectric and pyroelectric characteristics and is widely used for making capacitors and infrared sensors for example.

2. Description of the Prior Art

Owing to outstanding dielectric and pyroelectric characteristic, Perovskite-type dielectric material is widely used for a variety of industrial requirements.

Because of very high resistivity and dielectric constant, barium titanate BaTiO₃ is widely used for making ceramic filters and highly-dielectric capacitors. On the other hand, ceramics made from strontium titanate SrTiO₃ is mainly used for making power-supply capacitors due to less depending on the voltage in the presence of high voltage, although the dielectric constant is lower than that of the barium titanate. Magnesium titanate MgTiO₃ and calcium titanate CaTiO₃ feature outstanding temperature characteristics of dielectric constant and minimum dielectric loss factor. In particular, since magnesium titanate has the positive value of temperature coefficient of dielectric constant and calcium titanate has the negative value, both the dielectric constant and temperature coefficient of the dielectric constant are freely variable by manufacturing the blends (Mg, Ca)TiO₃. Owing to this advantage, the blend material is widely used for manufacturing temperature-compensative capacitors in a substantial volume. On the other hand, due to outstanding pyroelectric characteristics, lead titanate PbTiO₃ is widely used for making pyroelectric infrared sensors.

Recently, there is a positive movement among the concerned to make more compact and light-weight electronic parts. They positively follow up research on the effective application of thin film made from dielectric material to the production of compact capacitors having large capacity and monolithic sensors incorporating either field-effect transistors (FET) or bipolar transistors installed on the identical substrate.

Actually, there are few reports on the production of thin film made from strontium titanate, magnesium titanate, and calcium titanate. Conversely, there are a number of reports on the production of thin film made from barium titanate and lead titanate.

Study on the production of barium titanate during the past years was based on the vacuum evaporation process like the one announced by C. Feldman, Rev. Sci. Inst., 26, 463 (1955) and A. E. Feuersanger, J. Electrochem. Soc., 111, 1387 (1964) for example.

Nevertheless, when producing complex oxide like barium titanate for example, since the speeds of evaporating barium and titanium from the evaporation source are different from each other, their mol ratio cannot properly be controlled. Furthermore, since barium titanate has a very high melting point, heater material is necessarily blended with barium titanate, thus generating disadvantage. To solve this problem, recently, those who skilled in the art mostly follow up study on the production of barium titanate film by applying a RF-sputtering process using barium-titanate ceramic sheet as target. This process yields barium titanate film having a minimum of dielectric constant 1,000. This was reported by T. L. Rose, E. M. Kelliher, A. N. Scoville, and S. E. Stone, J. Appl. Phys., 55, 37.06 (1984) for example.

On the other hand, when producing barium titanate film based on the conventional RF-sputtering process, in order to make such barium titanate having a minimum of dielectric constant 1,000, a minimum of 900° C. of the substrate temperature or heating temperature is needed for securely forming thin film. In many cases, as a result of heat treatment with extremely high temperature and due to the growth of crystalline granules, either microscopic cracks or pin holes are generated. As a result, after formation of electrodes by evaporation, short-circuit is likely to be generated.

Likewise, a variety of trials were carried out for producing thin film made from lead titanate. Actually, those infrared sensors composed of poly-crystalline film of lead titanate were experimentally produced, where the produced film had such physical characteristics close to those of the bulk material. This was reported by M. Okuyama et al., in Jpn J. Appl. Phys. 22, Suppl. 21-1, 465 (1983) for example.

Furthermore, in order to effectively utilize the physical property of lead titanate which generates spontaneous polarization in the direction of the axis C, such an epitaxial film oriented in the direction of the axis C is produced. The produced film is provided with outstanding pyroelectric characteristics which triples the proper pyroelectric characteristics of bulk material. This was reported by R. Takayama et al., in Jpn. J. Appl. Phys., 61, 411 (1987).

Nevertheless, when producing thin film by means of the RF-sputtering process, film cannot be formed very quickly, and yet, since the sputtering rate varies according to the kinds of elements blended in the complex oxide, it is still difficult to properly control the structure of the formed film based on the stoichiometry. To overcome those problems, trials are underway for producing lead-titanate film based on the MO-CVD method which is capable of minimizing such defect mentioned above. As a result, such an epitaxial film oriented in the direction of the axis C has already been produced at a very fast depositing speed which is extremely faster than the RF-sputtering process at 500° C. through a maximum of 600° C. of the substrate temperature. This was reported by M. Okada et al., in J. Ceram. Soc. Jpn., 96, 687 (1988).

Nevertheless, in order to properly yield lead-titanate film oriented in the direction of the axis C by applying either the RF-sputtering or the MO-CVD process, it is essential for the system to heat the substrate to a minimum of 500° C.

SUMMARY OF THE INVENTION

An object of the invention is to provide a novel method of manufacturing dielectric film featuring outstanding dielectric and pyroelectric characteristics comparable to or surpassing those of bulk material at a temperature lower than, and a deposition speed faster than, the conventional RF-sputtering process and MO-CVD process.

To achieve the above object, the invention provides a plasma-excitation MO-CVD processing system for manufacturing a dielectric film, which decomposes and excites a blended gas of vapor of organometallic compound containing elements composing the dielectric and oxygen in plasma generated by either high-frequency discharge or electron cyclotron resonance (ECR) under 10 through 10⁻⁴ Torr of reduced pressure, to thereby generate active radical or ion so that a dielectric film can eventually be formed on a substrate.

If less than 10⁻⁴ Torr of reduced pressure were used for maintaining plasma, the film formation speed of the reacted material will be retarded. If this occurs, it raises a practical problem. Conversely, if more than 10 Torr of pressure were applied, plasma will not be able to effectively function itself. Accordingly, it is desired that the plasma be maintained under the reduced pressure ranging from 10 to 10⁻⁴ Torr.

By using an organometallic compound composed of a β-diketone metal complex containing barium or strontium (e.g., barium dipivaloyl methane Ba(DPM)₂, DPM=C₁₁ H₁₉ O₂, strontium dipivaloyl methane Sr(DPM)₂) and an organometallic compound composed of either a β-diketone metal complex containing titanium (e.g., titanium oxy-acetyl-acetonate TiO(AA)₂, AA=C₅ H₇ O₂) or a metal alkoxide containing titanium (e.g., titanium tetra-isopropoxide Ti(OC₃ H₇)₄), a barium titanate (BaTiO₃) film or a strontium titanate (SrTiO₃) film having dielectric characteristics comparable to that of bulk material can be formed at a substrate temperature of 400° C. or less.

By using an organometallic compound composed of a β-diketone metal complex containing magnesium (e.g., magnesium acetyl acetonate Mg(C₅ H₇ O₂)₂), an organometallic compound composed of a β-diketone metal complex containing calcium (e.g., calcium dipivaloyl methane Ca(DPM)₂), and an organometallic compound composed of a β-diketone metal complex containing titanium or a metal alkoxide containing titanium, a magnesium-calcium titanate (Mg, Ca)TiO₃ film having dielectric characteristics comparable to or surpassing those of bulk material can be formed at a substrate temperature of 600° C. or lower.

By using an organometallic compound containing titanium and an organometallic compound composed of a β-diketone metal complex containing lead such as lead acetyl acetonate Pb(C₅ H₇ O₂)₂ or a tetraethyl lead Pb(C₂ H₅)₄ or a tetraphenyl lead Pb(C₆ H₅)₄, then, a lead titanate PbTiO₃ film is formed at a substrate temperature of 300° C. or lower, which is oriented in the direction of the axis C and has epitaxially grown with respect to the substrate (made of MgO(100) for example). The formed lead titanate film is provided with satisfactory dielectric an pyroelectric characteristic comparable to or surpassing those of bulk material.

As mentioned above, in the method of manufacturing dielectric film according to the present invention, an organometallic compound, as the starting raw material is decomposed and excited by applying activation of plasma so that activated radical or ion can be generated to form a dielectric film. Accordingly, the method embodied by the invention can securely produce satisfactory dielectric film featuring outstanding dielectric characteristics and pyroelectric characteristics comparable to or surpassing those of bulk material at a temperature lower than, and at a deposition speed faster than, those of the conventional vacuum evaporation, RF-sputtering, or MO-CVD process.

Inventors of the invention previously reported that oxide magnetic thin films can be produced by the plasma-excitation MO-CVD process at a temperature lower than those of the conventional RF-sputtering and MO-CVD processes in the report presented by E. Fujii et al., in J. Magn. Soc. Jpn, 12, 2 (1988). The present invention proves that the plasma-excitation MO-CVD process is effective for the production of Perovskite-type dielectric films.

BRIEF DESCRIPTION OF THE DRAWINGS

FIG. 1 is a schematic block diagram of an embodiment of a plasma-CVD apparatus according to the invention; and

FIG. 2 is a schematic block diagram of an embodiment of an ECR plasma CVD apparatus according to the invention.

DESCRIPTION OF THE PREFERRED EMBODIMENTS The first embodiment

Refer to FIG. 1. The reference numeral 1 designates a reaction chamber, 2 electrodes, and 3 a gas-exhaust device including an oil-sealed pump and a mechanical booster pump to constantly maintain the interior of the reaction chamber 1 under a predetermined reduced pressure. The reference numeral 4 designates a substrate, 5 a high-frequency power-supply source (13.56 MHz), 6, 7 and 8 are respectively containers, or vaporizers, each storing an organometallic compound which is a starting raw material. The reference numeral 9 designates a carrier-gas (N₂) cylinder, 10 a reaction-gas (O₂) cylinder, and 11 a heater for heating the substrate 4.

First, barium dipivaloyl methane [Ba(DPM)₂ ] is stored in the container 6 and titanium tetra-isopropoxide [Ti(OC₃ H₇)₄ ] was stored in the container 7. After heating the contents in the containers 6 and 7 at 140° C. and 70° C., respectively, the vaporized compounds were introduced with nitrogen carrier (4.0 SCCM flow rate) into the inner space of the reaction chamber 1 which was reduced in pressure by the exhaust device 3. Simultaneously, oxygen as the reaction gas was supplied to the inner space of the reaction chamber 1 at 12.0 SCCM flow rate. Next, plasma was generated by supplying 0.5 W/cm² of electric power. Next, reaction was continued for 40 minutes under a low pressure reduced to 8.2×10⁻² Torr to form a dielectric film on the platinum substrate 4 which was constantly heated at 350° C.

By analyzing the obtained film, it was proved that the film was a barium-titanate (BaTiO₃) film having a Perovskite-type crystal structure and a thickness of 2.2 microns. Then, opposite platinum electrodes were formed by evaporation and then the dielectric properties were measured. The result was: εγ=4100 and tanδ=0.08.

The same method was repeated using other kinds of organometallic compounds as the starting raw material. Like the above case, satisfactory barium titanate films having outstanding dielectric characteristics were obtained. The result of the first embodiment is shown in Table 1.

                                      TABLE 1                                      __________________________________________________________________________                         Substrate                                                  Sample                                                                             Starting material                                                                              temperature  Formed                                        No. Vaporizer 6                                                                            Vaporizer 7                                                                            (°C.)                                                                          εγ                                                                  tan δ                                                                       film                                          __________________________________________________________________________     1   Ba(C.sub.11 H.sub.19 O.sub.2).sub.2                                                    Ti(OC.sub.3 H.sub.7).sub.4                                                             350    4100                                                                              0.08                                                                              BaTiO.sub.3                                   2   Ba(C.sub.11 H.sub.19 O.sub.2).sub.2                                                    Ti(n-C.sub.3 H.sub.7 O).sub.4                                                          400    4500                                                                              0.04                                                                              BaTiO.sub.3                                   3   Ba(C.sub.11 H.sub.19 O.sub.2).sub.2                                                    Ti(n-C.sub.4 H.sub.9 O).sub.4                                                          400    3800                                                                              0.02                                                                              BaTiO.sub.3                                   4   Ba(C.sub.5 HF.sub.6 O.sub.2).sub.2                                                     TiO(C.sub.5 H.sub.7 O.sub.2).sub.2                                                     370    3500                                                                              0.09                                                                              BaTiO.sub.3                                   __________________________________________________________________________      Note: Values of εγ were measured at 1 KHz and 25° C.

The second embodiment

Refer now to FIG. 2. The reference numeral 21 designates a plasma chamber for generating high-density ECR plasma, and 22 an electromagnet for generating magnetic field needed for generating electron cyclotron resonance (ECR). The reference numeral 23 designates a reaction chamber, 24 an inlet of microwave having 2.45 GHz of frequency, 25 an inlet of oxygen as the source of generating plasma, 26 a substrate, and 27 a substrate holder. The reference numerals 28 through 30 respectively designate vaporizers each containing a raw material, 31 an inlet of carrier gas N₂, and 32 an exhaust port connected to an oil-sealed pump and a turbo-molecular pump which compulsorily exhaust gas from the reaction chamber 23.

First, residual gas was removed from the plasma-generating chamber 21 and the reaction chamber 23 by lowering the inner pressure to 1.0×10⁻⁶ Torr or lower. Next, oxygen was supplied as the source of generating plasma to the plasma-generating chamber 21 through the inlet 25 at 3.4 SCCM flow rate. Then, plasma was generated inside of the plasma chamber 21 by magnetic field diverged by electromagnet 22. By feeding 400 W, 2.45 GHz of microwave from the inlet 24, the plasma was drawn into the reaction chamber 23. In the meanwhile, barium dipivaloyl methane Ba(DPM)₂ and titanium tetra-isopropoxide Ti(OC₃ H₇)₄ were respectively stored in the vaporizers 28 and 29 and then heated to 135° C. and 67° C., respectively, to vaporize them. The vaporized compounds were brought into contact with the active plasma for a half hour so that reaction can continuously be held. After completing these sequential processes, a dielectric film was formed on the platinum substrate 26.

Temperature of the platinum substrate constantly remained at 150° C. while the film formation was underway. The vacuum pressure was held at 5.2×10⁻⁴ Torr throughout the period of film formation.

It was proved from analysis of the formed film that the film was composed of barium titanate BaTiO₃ having a Perovskite crystalline structure and a thickness of 1.8 microns. After forming opposite platinum electrodes by evaporation process, dielectric properties were measured. The result was that εγ=3800 and tanδ=0.04. The same method was repeated using other kinds of organometallic compounds. Like the above case, satisfactory barium-titanate films having outstanding dielectric properties were obtained. The result of these experiments is shown in Table 2.

                                      TABLE 2                                      __________________________________________________________________________                         Substrate                                                  Sample                                                                             Starting material                                                                              temperature  Formed                                        No. Vaporizer 28                                                                           Vaporizer 29                                                                           (°C.)                                                                          εγ                                                                  tan δ                                                                       film                                          __________________________________________________________________________     5   Ba(C.sub.11 H.sub.19 O.sub.2).sub.2                                                    Ti(OC.sub.3 H.sub.7).sub.4                                                             150    3800                                                                              0.04                                                                              BaTiO.sub.3                                   6   Ba(C.sub.11 H.sub.19 O.sub.2).sub.2                                                    Ti(n-C.sub.3 H.sub.7 O).sub.4                                                          120    4300                                                                              0.08                                                                              BaTiO.sub.3                                   7   Ba(C.sub.11 H.sub.19 O.sub.2).sub.2                                                    Ti(n-C.sub.4 H.sub.9 O).sub.4                                                          160    4000                                                                              0.09                                                                              BaTiO.sub.3                                   8   Ba(C.sub.5 HF.sub.6 O.sub.2).sub.2                                                     Ti(C.sub.5 H.sub.7 O.sub.2).sub.2                                                      150    3700                                                                              0.10                                                                              BaTiO.sub.3                                   __________________________________________________________________________      Note: Values of εγ were measured at 1 KHz and 25° C.

The third embodiment

Again refer to FIG. 1. First, strontium dipivaloyl methane Sr(DPM)₂ was supplied to the vaporizer 6 and titanium tetraisopropoxide Ti(OC₃ H₇)₄ to the vaporizer 7, and then these compounds were heated to 147° C. and 69° C., respectively. Then together with nitrogen carrier flowing itself at 4.0 SCCM flow rate, the vaporized compounds were supplied to the inner space of the reaction chamber 1 of low pressure reduced by the exhaust device 3. Simultaneously, oxygen was supplied as the source of generating plasma to the reaction chamber 1 at 14.0 SCCM flow rate, and then plasma was generated in the chamber 1 by feeding 0.5 W/cm² of electric power. Reaction was continued for 40 minutes under 7.6×10⁻² Torr of reduced pressure, to thereby forming a dielectric film on the platinum substrate heated constantly at 390° C. It was confirmed from analysis of the formed film that the formed film was a strontium-titanate SrTiO₃ film having a Perovskite crystalline structure and a thickness of 2.6 microns. After forming opposite platinum electrodes by evaporation process, dielectric properties of the film were measured. It was confirmed that εδ=320 and tanδ=0.1 of the dielectric constant was obtained. Other kinds of organometallic compounds were examined in the same way. Similarly to the above, satisfactory strontium-titanate SrTiO₃ films having outstanding dielectric properties were obtained. The result of the experiments is shown in Table 3.

                                      TABLE 3                                      __________________________________________________________________________                         Substrate                                                  Sample                                                                             Starting material                                                                              temperature  Formed                                        No. Vaporizer 6                                                                            Vaporizer 7                                                                            (°C.)                                                                          εγ                                                                  tan δ                                                                       film                                          __________________________________________________________________________      9  Sr(C.sub.11 H.sub.19 O.sub.2).sub.2                                                    Ti(OC.sub.3 H.sub.7).sub.4                                                             390    320                                                                               0.1                                                                               SrTiO.sub.3                                   10  Sr(C.sub.11 H.sub.19 O.sub.2).sub.2                                                    Ti(n-C.sub.3 H.sub.7 O).sub.4                                                          380    370                                                                               0.1                                                                               SrTiO.sub.3                                   11  Sr(C.sub.11 H.sub.19 O.sub.2).sub.2                                                    Ti(n-C.sub.4 H.sub.9 O).sub.4                                                          400    290                                                                               0.2                                                                               SrTiO.sub.3                                   12  Sr(C.sub.5 HF.sub.6 O.sub.2).sub.2                                                     TiO(C.sub.5 H.sub.7 O.sub.2).sub.2                                                     400    350                                                                               0.1                                                                               SrTiO.sub.3                                   __________________________________________________________________________      Note: Values of εγ were measured at 1 KHz and 25° C.

The fourth embodiment

Again refer to FIG. 2. First, residual gas was removed from the plasma chamber 21 and the reaction chamber 23 by reducing the pressure to 1.0×10⁻⁶ Torr or lower. Next, oxygen was supplied as the source of generating plasma to the plasma chamber 21 through inlet 25 at 3.7 SCCM flow rate. Then, plasma was generated in the plasma chamber 21 by causing electromagnet 22 to diverge magnetic field inside of the plasma chamber 21. By radiating 450 W, 2.45 GHz of microwave through inlet 24, the plasma was moved to the reaction chamber 23. In the meanwhile, strontium dipivaloyl methane Sr(DPM)₂ and titanium tetra-isopropoxide Ti(OC₃ H₇)₄ were stored in vaporizers 28 and 29, and then heated to 136° C. and 70° C., respectively. The vaporized compounds were brought into contact with and reacted with the active plasma for a half hour so that the reaction can continuously be held. Finally, a dielectric film was formed on the platinum substrate. Temperature of the platinum substrate constantly remained at 180° C. while the film formation was underway. The vacuum pressure was held at 5.7×10⁻⁴ Torr throughout the period of film formation.

It was confirmed from analysis of the formed film that the film was a strontium titanate SrTiO₃ film having a Perovskite-type crystalline structure and a thickness of 2.1 microns. After forming opposite platinum electrodes by evaporation process, the dielectric properties were confirmed from measurement to be εγ=390 and tanδ=0.1. The same method was repeated using other kinds of organometallic compound. Like the above case, satisfactory strontium titanate films having outstanding dielectric properties were obtained. The result of the experiments is shown in Table 4.

                                      TABLE 4                                      __________________________________________________________________________                         Substrate                                                  Sample                                                                             Starting material                                                                              temperature  Formed                                        No. Vaporizer 28                                                                           Vaporizer 29                                                                           (°C.)                                                                          εγ                                                                  tan δ                                                                       film                                          __________________________________________________________________________     13  Sr(C.sub.11 H.sub.19 O.sub.2).sub.2                                                    Ti(OC.sub.3 H.sub.7).sub.4                                                             180    390                                                                               0.1                                                                               SrTiO.sub.3                                   14  Sr(C.sub.11 H.sub.19 O.sub.2).sub.2                                                    Ti(n-C.sub.3 H.sub.7 O).sub.4                                                          170    360                                                                               0.1                                                                               SrTiO.sub.3                                   15  Sr(C.sub.11 H.sub.19 O.sub.2).sub.2                                                    Ti(n-C.sub.4 H.sub.9 O).sub.4                                                          140    310                                                                               0.1                                                                               SrTiO.sub.3                                   16  Sr(C.sub.5 HF.sub.6 O.sub.2).sub.2                                                     TiO(C.sub.5 H.sub.7 O.sub.2).sub.2                                                     170    400                                                                               0.1                                                                               SrTiO.sub.3                                   __________________________________________________________________________

The fifth embodiment

Again refer to FIG. 1. First, magnesium acetyl acetonate [Mg(AA)₂ ] was supplied to the vaporizer 6, calcium dipivaloyl methane [Ca(DPM)₂ ] to the vaporizer 7, and titanium tetra-isopropoxide [Ti(OC₃ H₇)] to the vaporizer 8. These compounds were respectively heated to 170° C., 140° C. and 70° C., to vaporize them. Together with nitrogen carrier flowing at 4.0 SCCM flow rate, the vaporized compounds were supplied to the inner space of the reaction chamber 1 of low pressure reduced by the exhaust device 3. Simultaneously, oxygen was supplied as the reaction gas to the inner space of the reaction chamber 1 at 12.0 SCCM flow rate to allow plasma to be generated (0.5 W/cm²). Reaction of the vaporized compounds and the plasma was continued for an hour under 8.0×10⁻² Torr of reduced pressure, thereby to form a dielectric film on the platinum substrate heated at 550° C.

It was confirmed from analysis of the formed film that the film was a Mg₀.94 Ca₀.06 TiO₃ film having a Perovskite crystalline structure and a thickness of 5.1 microns. After forming opposite platinum electrodes by evaporation process, it was confirmed from measurement that dielectric constant εY=23 and temperature constant Tc =0±35 ppm/° C. were obtained.

When magnesium acetyl acetonate and titanium tetraisopropoxide were used as the starting raw materials, a film composed of magnesium titanate MgTiO₃ was formed on the substrate heated at 580° C. On the other hand, when calcium dipivaloyl methane and titanium tetra-isopropoxide were used, a film composed of calcium titanate CaTiO₃ was formed on the substrate heated at 580° C. The former magnesium-titanate film showed 14 of dielectric constant and Tc+157 ppm/° C. of temperature coefficient. The latter calcium titanate dielectric film generated ε=134 of dielectric constant and Tc =-1470 ppm/° C. of temperature co-efficient. These values are comparable to those of bulk material. Using other organometallic compounds, magnesium-calcium titanate (Mg, Ca)TiO₃ films were obtained at a 600° C. or lower of substrate temperature, with satisfactory dielectric constant and temperature coefficient comparable to those of bulk material.

The sixth embodiment

Again refer to FIG. 2. First, residual gas was removed by lowering the inner pressure of the plasma chamber 21 and the reaction chamber 23. Next, oxygen was supplied as the source of generating plasma to the plasma chamber 21 through inlet 25 at 3.4 SCCM flow rate. Simultaneously, 400 W, 2.45 GHz of microwave was supplied to the plasma chamber 21 through inlet 24, and then ECR plasma was generated by adjusting the intensity of magnetic field to 875 Gauss by means of electromagnet 22. At the same time, availing of the presence of magnetic field diverged by magnet 22, plasma generated in the plasma chamber 21 was drawn to the reaction chamber 23. In the meanwhile, magnesium acetyl acetonate, calcium dipivaloyl methane, and titanium tetra-isopropoxide were stored in the vaporizers 28, 29 and 30, and heated to 160° C., 135° C. and 65° C., respectively. Then the vaporized compounds were supplied to the reaction chamber 23 together with nitrogen carrier flowing at 1.3 SCCM rate. The vaporized compounds were brought into contact with and reacted with active plasma extracted from the plasma chamber 21. The reaction was continued for 40 minutes, to form a dielectric film on the platinum substrate. Temperature of the plutinum substrate constantly remained at 350° C. while the film formation was underway. The vacuum pressure remained at 5.8×10⁻⁴ Torr throughout the period of film formation.

It was confirmed from analysis of the formed film that the film has a composition Mg₀.92 Ca₀.08 TiO₃ having a Perovskite crystal structure and a thickness 3.2 microns. After forming opposite platinum electrodes by evaporation process, it was confirmed that the film has a dielectric constant ε=20 and a temperature coefficient Tc =0±37 ppm/° C.

When magnesium acetyl acetonate and titanium tetraisopropoxide were used as the raw materials, a dielectric film composed of magnesium titanate MgTiO₃ was obtained at 350° C. of substrate temperature. On the other hand, when calcium dipivaloyl methane and titanium tetra-isopropoxide were used, a dielectric film composed of calcium titanate CaTiO₃ was obtained at 350° C. of substrate temperature. The MgTiO₃ dielectric film showed a dielectric constant ε=15 and a temperature coefficient Tc =±142 ppm/° C. The CaTiO₃ dielectric film showed ε=122 and Tc =-1560 ppm/° C. These values are comparable to those of bulk material.

Using other organometallic compounds as the raw materials, dielectric films composed of magnesium-calcium titanate (Mg, Ca)TiO₃ were formed at 400° C. or lower of substrate temperature.

The seventh embodiment

Again refer to FIG. 1. First, lead acetyl acetonate Pb(C₅ H₇ O₂)₂ was stored in the vaporizer 6 and titanium tetra-isopropoxide Ti(OC₃ H₇)₄ was stored in the vaporizer 7, and then heated to 130° C. and 70° C., respectively. Next, the vaporized compounds were supplied to the inner space of the reaction chamber 1 having low pressure reduced by the exhaust device 3 together with nitrogen carrier flowing at 3.2 SCCM flow rate. Simultaneously, oxygen was supplied as the source of generating plasma to the reaction chamber 1 at 5.8 SCCM flow rate to generate plasma of 0.3 W/cm² of electric power. Reaction was continued for a half hour in presence of 8.5×10⁻² Torr of reduced pressure, thereby to form a dielectric film on the MgO(100) substrate heated at 280° C.

It was confirmed from analysis of the formed film that the film was a lead titanate PbTiO₃ film having a Perovskite crystal structure and a thickness of 2.2 microns. Furthermore, the lead titanate film formed by the above process was fully oriented in the direction of the axis C. This suggests that epitaxial growth took place as a result of perfect matching with the lattice constant of the substrate. The formed film had a specific dielectric constant ε*/εo=92, a pyroelectric constant γ=3.4×10⁻⁸ C/cm² K, tanδ* =0.01, and in addition, a specific resistance value of 9.3×10⁹ Ω.cm.

The results of tests using other organometallic compounds and other substrates are shown in Table 5 together with the results of those tests described above.

                                      TABLE 5                                      __________________________________________________________________________                        Specific                                                                            Pyroelectric                                           Sample                                                                             Starting material                                                                             dielectric                                                                          coefficient                                                                               Resistivity Formed                          No. Vaporizer 6                                                                           Vaporizer 7                                                                            constant                                                                            (C/cm.sup.2 K)                                                                        Tan δ.sup.v                                                                  (Ω · cm)                                                              Substrate                                                                            film                            __________________________________________________________________________     17  Pb(C.sub.5 H.sub.7 O.sub.2).sub.2                                                     Ti(OC.sub.3 H.sub.7).sub.4                                                             92   3.4 × 10.sup.-8                                                                 0.01                                                                               9.3 × 10.sup.9                                                                 MgO(100)                                                                             Orientation                                                                    to axis C                                                                      PbTiO.sub.3                     18  Pb(C.sub.5 H.sub.7 O.sub.2).sub.2                                                     Ti(n-C.sub.3 H.sub.7 O).sub.4                                                          100  2.7 × 10.sup.-8                                                                 0.01                                                                               9.7 × 10.sup.9                                                                 MgO(100)                                                                             Orientation                                                                    to axis C                                                                      PbTiO.sub.3                     19  PB(C.sub.2 H.sub.5).sub.4                                                             Ti(n-C.sub.4 H.sub.9 O).sub.4                                                          95   3.1 × 10.sup.-8                                                                 0.01                                                                               9.8 × 10.sup.9                                                                 (001) Orientation                                                              MgAl.sub.2 O.sub.4                                                                   to axis C                                                                      PbTiO.sub.3                     20  Pb(C.sub.6 H.sub.5).sub.4                                                             TiO(C.sub.5 H.sub.7 O.sub.2).sub.2                                                     92   3.0 × 10.sup.-8                                                                 0.01                                                                               .sup. 1.0 × 10.sup.10                                                          (001) Orientation                                                              MgAl.sub.2 O.sub.4                                                                   to axis C                                                                      PbTiO.sub.3                     __________________________________________________________________________      Note: All the above test results were measured without polarization            process.                                                                 

The eighth embodiment

Again refer to FIG. 2. First, residual gas was removed from the plasma chamber 21 and the reaction chamber 23 which were depressurized to 1.0×10⁻⁶ Torr. Next, oxygen was supplied as the source of generating plasma to the plasma chamber 21 via inlet 25 at 8.2 SCCM flow rate. Next, ECR plasma was generated by feeding 400 W, 2.45 GHz of microwave through inlet 24 and adjusting the intensity of magnetic field by means of electromagnet 22. Simultaneously, the ECR plasma was moved by magnetic field diverged from electromagnet 22 from the plasma chamber 21 to the reaction chamber 23. On the other hand, lead acetyl acetonate and titanium tetra-isopropoxide were stored in the vaporizers 28 and 29, respectively, and then heated to 120° C. and 65° C. The vaporized compounds were fed to the reaction chamber 23 together with nitrogen carrier flowing at 1.0 SCCM flow rate. The vaporized compounds were brought into contact with and reacted with active plasma which was extracted from the plasma chamber 21. The reaction was continued for a half hour to form a dielectric film on the MgO(100) substrate. Temperature of the MgO substrate constantly remained at 80° C., while the film formation was underway. The vacuum pressure remained at 4.6×10⁻⁴ Torr throughout the period of film formation.

It was confirmed from the analysis of the formed film that the film was a lead titanate PbTiO₃ film having a Perovskite crystal structure and oriented in the direction of the axis C. The formed film had a thickness of 1.8 microns, a specific dielectric constant ε*/εo =85, a pyroelectric coefficient γ=3.1×10⁻⁸ C/cm² K , tanδ*=0.02 and a specific resistance value ρ=1.2×10¹⁰ Ω.cm. The results of tests made for other organometallic compounds and other substrates are shown in Table 6 together with the results of those tests shown above.

                                      TABLE 6                                      __________________________________________________________________________                        Specific                                                                            Pyroelectric                                           Sample                                                                             Starting material                                                                             dielectric                                                                          coefficient                                                                               Resistivity Formed                          No. Vaporizer 6                                                                           Vaporizer 7                                                                            constant                                                                            (C/cm.sup.2 K)                                                                        Tan δ.sup.v                                                                  (Ω · cm)                                                              Substrate                                                                            film                            __________________________________________________________________________     21  Pb(C.sub.5 H.sub.7 O.sub.2).sub.2                                                     Ti(OC.sub.3 H.sub.7).sub.4                                                             85   3.1 × 10.sup.-8                                                                 0.02                                                                               1.2 × 10.sup.10                                                                MgO(100)                                                                             Orientation                                                                    to axis C                                                                      PbTiO.sub.3                     22  Pb(C.sub.5 H.sub.7 O.sub.2).sub.2                                                     Ti(n-C.sub.3 H.sub.7 O).sub.4                                                          101  3.4 × 10.sup.-8                                                                 0.01                                                                               9.9 × 10.sup.9                                                                 MgO(100)                                                                             Orientation                                                                    to axis C                                                                      PbTiO.sub.3                     23  PB(C.sub.2 H.sub.5).sub.4                                                             Ti(n-C.sub.4 H.sub.9 O).sub.4                                                          92   3.1 × 10.sup.-8                                                                 0.02                                                                               1.1 × 10.sup.10                                                                (001) Orientation                                                              MgAl.sub.2 O.sub.4                                                                   to axis C                                                                      PbTiO.sub.3                     24  Pb(C.sub.6 H.sub.5).sub.4                                                             TiO(C.sub.5 H.sub.7 O.sub.2).sub.2                                                     91   3.2 × 10.sup.-8                                                                 0.01                                                                               1.0 × 10.sup.10                                                                (001) Orientation                                                              MgAl.sub.2 O.sub.4                                                                   to axis C                                                                      PbTiO.sub.3                     __________________________________________________________________________      Note: All the above test results were measured without polarization            process.                                                                  

What is claimed is:
 1. A method of manufacturing a dielectric film, in which vapor of an organometallic compound composed of a β-diketone metal complex containing barium, vapor of an organometallic compound composed of either a β-diketone metal complex containing titanium or a metal alkoxide containing titanium, and oxygen are decomposed and reacted in plasma which is generated by means of high-frequency discharge of electron cyclotron resonance under a reduced pressure of 10 through 10⁻⁴ Torr, thereby forming a perovskite-type film of barium titanate of the formula BaTiO₃ on a substrate heated to 400° C. or lower.
 2. A method as set forth in claim 1, wherein said β-diketone metal complex containing barium is barium dipivaloyl methane of the formula Ba(C₁₁ H₁₉ O₂)₂, or barium hexafluoroacetylacetonate of the formula Ba(C₅ HF₆ O₂)₂.
 3. A method as set forth in claim 1, wherein said β-diketone metal complex containing titanium is titanium oxyacetylacetonate of the formula TiO(C₅ H₇ O₂)₂, and said metal alkoxide containing titanium is titanium tetraisopropoxide of the formula Ti(OC₃ H₇)₄, or tetra-n-propyl orthotitanate of the formula Ti(n-C₃ H₇ O)₄, or titanium tetra-n-butoxide of the formula Ti(n-C₄ H₉ O)₄.
 4. A method of manufacturing a dielectric film, in which vapor of an organometallic compound composed of a β-diketone metal complex containing strontium, vapor of an organometallic compound composed of either a β-diketone metal complex containing titanium or a metal alkoxide containing titanium, and oxygen are decomposed and reacted in plasma which is generated by means of high-frequency discharge or electron cyclotron resonance under a reduced pressure of 10 through 10⁻⁴ Torr, thereby forming a perovskite-type film of strontium titanate of the formula SrTiO₃ on a substrate heated to 400° C. or lower.
 5. A method as set forth in claim 4, wherein said β-diketone metal complex containing strontium is strontium dipivaloyl methane of the formula Sr(C₁₁ H₁₉ O₂)₂, or strontium hexafluoroacetylacetonate of the formula Sr(C₅ HF₆ O₂)₂.
 6. A method as set forth in claim 4, wherein said β-diketone metal complex containing titanium is titanium oxyacetylacetonate of the formula TiO(C₅ H₇ O₂)₂, and said metal alkoxide containing titanium is titanium tetraisopropoxide of the formula Ti(OC₃ H₇)₄, or tetra-n-propyl orthotitanate of the formula Ti(N-C₃ H₇ O)₄, or titanium tetra-n-butoxide of the formula Ti(n-C₄ H₉ O)₄.
 7. A method of manufacturing a dielectric film, in which vapor of an organometallic compound composed of a β-diketone metal complex containing magnesium, vapor of an organometallic compound composed of either a β-diketone metal complex containing titanium or a metal alkoxide containing titanium, and oxygen are decomposed and reacted in plasma which is generated by means of high-frequency discharge or electron cyclotron resonance under a reduced pressure of 10 through 10⁻⁴ Torr, thereby forming a perovskite-type film of magnesium titanate of the formula MgTiO₃ on a substrate heated to 600° C. or lower.
 8. A method as set forth in claim 7, wherein said β-diketone metal complex containing magnesium is magnesium acetylacetonate of the formula Mg(C₅ H₇ O₂)₂.
 9. A method as set forth in claim 7, wherein said β-diketone metal complex containing titanium is titanium oxyacetylacetonate of the formula TiO(C₅ H₇ O₂)₂, and said metal alkoxide containing titanium is titanium tetraisopropoxide of the formula Ti(OC₃ T₇)₄, or tetra-n-propyl orthotitanate of the formula Ti(n-C₃ H₇ O)₄, or titanium tetra-n-butoxide of the formula Ti(n-C₄ H₉ O)₄.
 10. A method of manufacturing a dielectric film, in which vapor of an organometallic compound composed of a β-diketone metal complex containing calcium, vapor of an organometallic compound composed of either a β-diketone metal complex containing titanium or a metal alkoxide containing titanium, and oxygen are decomposed and reacted in plasma which is generated by means of high-frequency discharge or electron cyclotron resonance under a reduced pressure of 10 through 10⁻⁴ Torr, thereby forming a perovskite-type film of calcium titanate of the formula CaTiO₃ on a substrate heated to 600° C. or lower.
 11. A method as set forth in claim 10, wherein said β-diketone metal complex containing calcium is calcium dipivaloyl methane of the formula Ca(C₁₁ H₁₉ O₂)₂.
 12. A method as set forth in claim 10, wherein said β-diketone metal complex containing titanium is titanium oxyacetylacetonate of the formula TiO(C₅ H₇ O₂)₂, and said metal alkoxide containing titanium is titanium tetraisopropoxide of the formula Ti(OC₃ H₇)₄, or tetra-n-propyl orthotitanate of the formula Ti(n-C₃ H₇ O)₄, or titanium tetra-n-butoxide of the formula (Ti(n-C₄ H₉ O)₄.
 13. A method of manufacturing a dielectric film, in which vapor of an organometallic compound composed of a β-diketone metal complex containing magnesium, vapor of an organometallic compound composed of a β-diketone metal complex containing calcium, vapor of an organometallic compound composed of either a β-diketone metal complex containing titanium or a metal alkoxide containing titanium, and oxygen are decomposed and reacted in plasma which is generated by means of high-frequency discharge or electron cyclotron resonance under a reduced pressure of 10 through 10⁻⁴ Torr, thereby forming a film of perovskite-type magnesium-calcium titanate of the formula (Mg, Ca)TiO₃ on a substrate heated to 600° C. or lower.
 14. A method as set forth in claim 13, wherein said β-diketone metal complex containing magnesium is magnesium acetylacetonate of the formula Mg(C₅ H₇ O₂)₂, and said β-diketone metal complex containing calcium is calcium dipivaloyl methane of the formula Ca(C₁₁ H₁₉ O₂)₂.
 15. A method as set forth in claim 13, wherein said β-diketone metal complex containing titanium is titanium oxyacetylacetonate of the formula TiO(C₅ H₇ O₂)₂, and said metal alkoxide containing titanium is titanium tetraisopropoxide of the formula Ti(OC₃ H₇)₄, or tetra-n-propyl orthotitanate of the formula Ti(n-C₃ H₇ O)₄, or titanium tetra-n-butoxide of the formula Ti(n-C₄ H₉ O)₄.
 16. A method of manufacturing a dielectric film, in which vapor of an organometallic compound composed of a β-diketone metal complex containing lead, tetraethyl lead or tetraphenyl lead, vapor of an organometallic compound composed of either a β-diketone metal complex containing titanium or a metal alkoxide containing titanium, and oxygen are decomposed and reacted in plasma which is generated by means of high-frequency discharge or electron cyclotron resonance under a reduced pressure of 10 through 10⁻⁴ Torr, thereby forming on a substrate heated to 300° C. or lower a film of perovskite-type lead titanate of the formula PbTiO₃ which is oriented in the direction of c-axis and epitaxially grown with respect to the substrate.
 17. A method as set forth in claim 16, wherein said β-diketone metal complex containing lead is lead acetylacetonate of the formula Pb(C₄ H₇ O₂)₂.
 18. A method as set forth in claim 16, wherein said β-diketone metal complex containing titanium is titanium oxyacetylacetonate of the formula TiO(C₅ H₇ O₂)₂, and said metal alkoxide containing titanium is titanium tetraisopropoxide of the formula Ti(OC₃ H₇)₄, or tetra-n-propyl orthotitanate of the formula Ti(n-C₃ H₇ O)₄, or titanium tetra-n-butoxide of the formula Ti(n-C₄ H₉ O)₄. 